E-gas is a high-quality, high-purity gas used in the semiconductor, solar panel, and precision electronics industries. Its functions include etching, cleaning, and doping in chip and electronic device manufacturing.
We offer a wide range of e-gases with purity standards ranging from 3N to 7N. Here is a list of available products:
| Product | Name | Purity |
|---|---|---|
| N2O | Nitrous Oxide | 3N/5N5 |
| CL2 | Chlorine | 5N |
| TCS | Trichorosilane | 4N |
| DCS | Dichlorosilane | 4N |
| SiCL4 | Silicon Tetrachloride | 5N |
| C3F8 | Octafluoropropane | 5N |
| BCL3 | Boron Trifluoride | 5N |
| D2 | Deuterium | 5N |
| CHF3 | Trifluoromethane | 5N |
| C4F8 | Octafluorocyclobutane | 5N |
| C2F6 | Hexafluoroethane | 5N |
| NF3 | Nitrogen Trifluoride | 4N |
| C4F6 | Sulfur Hexafluoride | 4N/5N |
| SF6 | Sulfur Hexafluoride | 5N |
| CF4 | Tetrafluoromethane | 5N |
| SiH4 | Silane | 6N |
| NH3 | Ammonia | 5N/6N/7N |
| BF3 | Boron Trichloride | 4N |
| WF6 | Tungsten Hexafluoride | 5N |
| HBr | Hydrogen Bromide | 5N |
| CH3F | Mono Fluoromethane | 3N/4N5/5N |
| CH2F2 | Difluoromethane | 3N/5N |
| COS | Carbonyl Sulfide | 4N |
| C2HF5 | Pentafluoroethane | 4N |
| CF3I | Trifluoroiodomethane | 4N |
| C5F8 | Octafluorocyclopentene | 4N |
| SiF4 | Silicon Tetrafluoride | 5N |
| CH6Si | Methylsilane | 4N |
| C3H10Si | Trimethylsilane | 4N |
| Cl6Si2 | Hexachlorodisilane | 3N |
| HF | Hydrogen Fluoride | 3N/5N |